Chemistry

Boron Ultra online boron analyser in ultrapure water for microelectronics applications

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Continuous, online monitoring of boron down to single parts per trillion (ppt) levels As semiconductor chips become smaller and more complex, the demand for high-quality ultrapure water (UPW) is critical. Even the slightest contamination can cause significant defects, making early detection of impurities essential in microelectronics manufacturing. The new Sievers Boron Ultra analyser is the only real-time online boron analyser on the market that monitors boron in ultrapure water to single parts per trillion (ppt), exceeding the International Roadmap for Devices and Systems (IRDS) specification of 50 ppt. The analyser has been designed in collaboration with semiconductor manufacturers to meet the needs of facility managers, UPW system owners and UPW process control engineers. Features:

Continuous, online monitoring down to parts per trillion (ppt) of boron
20 data points per hour
Compliance with primary loop and polishing specifications
Meets all requirements for UKCA and CE marking
Multi-channel options: available in single channel and dual channel
Modern, intuitive graphical user interface with 10.1-inch touchscreen with multi-colour LED backlighting
Wide range of outputs: two isolated 4-20 mA analogue outputs; two alarm outputs; two isolated binary outputs; two USB 2.0 ports; and one Gigabit Ethernet port
Minimal maintenance and consumables

Applications: semiconductors and microelectronics. Ultrapure process water/UPW.

Contamination control
Regulatory compliance
Resin regeneration optimisation
Process control

Operating Specifications
Range	0.010 – 100 ppb B
Limit of Quantification (LOQ)	0.030 ppb B
Limit of Detection (LOD)	0.010 ppb B
Accuracy	± 0.01 ppb B, <0.03 ppb B ± 15%, ≥ 0.03 ppb B
Precision	SD ≤ 0.003 ppb B, ≤ 0.100 ppb B RSD ≤ 3%, > 0.100 ppb B
Minimum Sample Resistivity	15 MΩ–cm
Sample Temperature	15°-40°C (59-104°F)
Sample Flow Rate	50-400 mL/min
Sample Pressure	103-689 kPa (15-100 psig)
Calibration Stability	Typically 12 months
Sample Particulates	15-micron pre-filtration
Waste	Gravity drain (no back pressure), vented
Analysis Modes	Online, Averaged, and Online Timed
Analysis Time¹	3 minutes or 6 minutes
Analyzer Specifications
Power Requirements	100-240 VAC, 40 W, 50/60 Hz
Safety Certifications	CE, UKCA, ETL listed. Conforms to UL Std. 61010-1. Certified to CSA 22.2 No. 61010-1.
Display	LED Backlit, 10.1-inch, 1280 x 800 Display with touchscreen
IP Rating	IP 45
Inputs	3 isolated Binary inputs
Outputs	2 isolated 4-20 mA Analog Outputs; 2 Alarm outputs; 2 isolated Binary Outputs; 2 USB 2.0 Ports (one external, one internal); 1 Gigabit Ethernet Port;
Communication Protocols	Modbus TCP/IP
Transient Overvoltage	Installation (Overvoltage) Category II (Instrument Environment Pollution Degree 2 assumed for purposes of testing and judging insulation integrity)
Dimensions	54.2 H x 59.3 W x38.8 D cm (21.35 H x 23.35 W x 15.27 D in)
Weight	Empty: 21.75kg (48 lb); With Consumables: 23.1 kg (51 lb)
Minimum Clearances (for temperature, humidity control, and access)	Front: 48.3 cm (19 in); Rear 2.5cm (1 in); Sides:30.5 cm (12 in) each side; Top: 30.5 cm (12 in); Bottom: Analyzer stands provide desktop clearance.
Available Configurations	One-Stream or Two-Stream (Optional)
Ambient Temperature	10-40°C (50-104 °F)
Altitude	Designed for use at altitudes up to 2000 m (6561 ft.)
Maximum Relative Humidity	Up to 95%, non-condensing
Consumables
Boron Reagent	45 days at 3-minute sampling rate; 90 days at 6-minute sampling rate
Reagent Column	12 months
Zero Column	12 months
Peristaltic Pump Head	12 months